LAUSR.org creates dashboard-style pages of related content for over 1.5 million academic articles. Sign Up to like articles & get recommendations!

Thin-film coating on cylinder for fabrication of cylindrical mold: Roll-to-roll nano-imprint lithography

Photo from wikipedia

Abstract An optimized thin-film method for coating on a horizontal rotating cylinder is presented in this paper. The drop-casting technique is used to obtain uniform thin-film coating up to the… Click to show full abstract

Abstract An optimized thin-film method for coating on a horizontal rotating cylinder is presented in this paper. The drop-casting technique is used to obtain uniform thin-film coating up to the micro/nano scale. To cover the entire surface, the cylinder rotates about its own axis and the needle applicator moves along it. The thin-film-coated cylinder can be further used as a roller mold in roll-to-roll imprinting after the photolithography process. A supportive theoretical analysis of the drop-casting technique also is presented herein. The theoretical model includes an evolution equation based on lubrication theory and the physics of the needle applicator for the particular experimental setup. The circumstances under which the uniform thin film is generated on a rotating cylinder are investigated for different concentrations of material in appropriate parameter ranges. Additionally, the results of theoretical and experimental investigations are analyzed for the purposes of a comprehensive summary of uniform thin-film coating.

Keywords: roll roll; mold roll; thin film; film; film coating

Journal Title: Microelectronic Engineering
Year Published: 2019

Link to full text (if available)


Share on Social Media:                               Sign Up to like & get
recommendations!

Related content

More Information              News              Social Media              Video              Recommended



                Click one of the above tabs to view related content.