LAUSR

Abstract Ultrafast laser-induced surface modification of materials has attracted significant attention in recent years. The mechanism of formation of ultrafast laser-induced periodic surface structures (LIPSS), which were evenly distributed over the large area of indium tin oxide, was studied both theoretically and experimentally. Films were deposited using 10-ps 1064-nm laser. Resistance and transmission characteristics of LIPSSs on ITO film were analyzed. The resistance of LIPSSs increases with the increasing of transmittance in infrared band within a certain range. The paper reports the optimal processing parameters for the realization of LIPSSs on ITO films established based on the resistance and transmission properties of the film. The film with the optimized structure can significantly improve the infrared transmittance function of ITO while ensuring the low resistance, which can greatly improve the power generation efficiency of the thin film solar cells.