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Abstract A method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be… Click to show full abstract
Abstract A method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be calculated and corrected by observing the working order and its adjacent order. An experimental mosaic of two 50 mm × 50 mm , 79 grooves / mm echelles is aligned to verify the theory. The rms wavefront is better than 0.04 wavelength. Angular and translation sensitivities of less than 1 arcsec and 10 nm are achieved respectively.
Keywords:
lateral shearing;
echelle gratings;
method;
shearing interferometry;
gratings tiling;
based lateral
Journal Title: Optics and Laser Technology
Year Published: 2022
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Journal Title: Optics and Laser Technology
Year Published: 2022
Link to full text (if available)
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recommendations!