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A nickel(II) guanidinate compound and its potential as CVD precursor for nickel related films

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Abstract In this study, a nickel(II) compound with guanidinate ligand of the general form [((Me)2NC(iPrN)2)2Ni] has been synthesized and isolated from the reaction of NiCl2 with the corresponding lithium salt… Click to show full abstract

Abstract In this study, a nickel(II) compound with guanidinate ligand of the general form [((Me)2NC(iPrN)2)2Ni] has been synthesized and isolated from the reaction of NiCl2 with the corresponding lithium salt of guanidinate ligand [(Me)2NC(iPrN)2Li] at 70 °C. Its structure was determined by 1H NMR, elemental analysis, and single crystal X-ray diffraction. Thermogravimetric analysis (TGA) was employed to study the thermal properties (including thermal stability, volatility, vapor pressure and transport behavior) of compound. Furthermore, a deposition experiment was made to examine the compound’s potential as CVD precursor, and a Ni metal film was successfully deposited. These preliminary results illustrate the potential of this compound to act as CVD precursor.

Keywords: compound potential; potential cvd; compound; cvd precursor

Journal Title: Polyhedron
Year Published: 2018

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