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Periodic Error Compensation in Fiber-coupled Heterodyne Interferometry

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Abstract This paper extends the application of a novel wavelet-based periodic error compensation algorithm in fiber-coupled heterodyne interferometry. In this case, the amplitudes of periodic error may be fluctuating and… Click to show full abstract

Abstract This paper extends the application of a novel wavelet-based periodic error compensation algorithm in fiber-coupled heterodyne interferometry. In this case, the amplitudes of periodic error may be fluctuating and traditional digital algorithms are not well-suited. The wavelet-based method, however, has the ability to compensate non-stationary periodic error. In this work, the algorithm is used to compensate periodic error in simulated and experimental constant and experimental non-constant velocity motions and to reduce the error by approximately 80.1%, 81.2% and 68.3%.

Keywords: error; error compensation; periodic error; heterodyne interferometry; coupled heterodyne; fiber coupled

Journal Title: Procedia Manufacturing
Year Published: 2017

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