LAUSR

Abstract By using micro-electro-mechanical systems (MEMS), this work develops flexible four-in-one (temperature, voltage, current and flow) micro sensors on a flexible substrate. The flexible four-in-one micro sensors use polyimide as the protective layer, owing to its high temperature resistance. This paper will involve designing and fabricating the flexible four-in-one micro sensors and low-temperature proton exchange membrane fuel cell (LP-PEMFC). A programmable thermal shock tester and a programmable temperature and humidity tester were used to simulate the inner environment of the LP-PEMFC. The calibration curves reveal repeatability and highly linear of the flexible four-in-one micro sensors. After calibrated and its reliability confirmed, the flexible four-in-one micro sensors are inserted into the LP-PEMFC for local microcosmic measurement. In particular, the inside data and performance are monitored to optimize the performance and extend the life of a fuel cell.