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Novel phenomenon of negative permittivity in silicon-based PiN diodes induced by electron irradiation

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Abstract The negative permittivity of silicon-based PiN diodes is investigated experimentally in the frequency range from 1 Hz to 10 MHz, where electron irradiations and annealing thermal treatments are carried out. The… Click to show full abstract

Abstract The negative permittivity of silicon-based PiN diodes is investigated experimentally in the frequency range from 1 Hz to 10 MHz, where electron irradiations and annealing thermal treatments are carried out. The permittivity is found be greatly affected by electron irradiations. In addition, the dispersion-free region is found be occurred in the samples irradiated by electron dose≥5.4646 × 1014 e/cm2. Besides, annealing treatments also have an effect on the permittivity. It is interesting to find that, the annealing treatments lead to more negative platform (i.e., dispersion-free region) values of permittivity for samples irradiated by electron dose≥5.4646 × 1014 e/cm2, and the negative platform values under 350 °C annealing treatment are lower than that under 150 °C annealing treatment when the electron irradiation dose is higher than 1.0929 × 1015 e/cm2. The novel phenomenon found in this work may provide new ideas for the application of semiconductor devices in information transmission, storage and processing.

Keywords: based pin; permittivity; silicon based; permittivity silicon; negative permittivity; pin diodes

Journal Title: Superlattices and Microstructures
Year Published: 2021

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