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Growth and characterization of in-situ formed Fe-TiN nanocomposite sputter-deposited coatings

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Abstract Iron-rich nanocomposite Fe-Ti-N coatings are deposited by reactive direct-current magnetron sputtering. Co-deposition from two targets (Fe and Ti) onto substrates placed at different locations gives a combinatorial approach to… Click to show full abstract

Abstract Iron-rich nanocomposite Fe-Ti-N coatings are deposited by reactive direct-current magnetron sputtering. Co-deposition from two targets (Fe and Ti) onto substrates placed at different locations gives a combinatorial approach to film composition effects, with the Fe/Ti atomic ratio varying from 0.5 to 38. The influence of substrate-temperature is also studied. The nanohardness of the coatings increases with Fe content, and is as high as ~15 GPa, far exceeding the value for pure-iron, and comparable alloy coatings. The nanowear resistance of the coatings scales as expected with their hardness, but their abrasive wear resistance is dependent on their adhesion to the substrate.

Keywords: growth characterization; formed tin; characterization situ; nanocomposite sputter; tin nanocomposite; situ formed

Journal Title: Surface and Coatings Technology
Year Published: 2019

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