LAUSR

Abstract Coatings have attracted much attention because they improve the surface properties while retain favorable bulk properties. For the development of coatings in biomedical applications, the combination of the mechanical characteristics, tribological properties, corrosion behavior, and biocompatibility should be noticed. The present work addresses the mechanical and tribological characteristics and corrosion resistance of ZrO2 coatings on 316L SS as a function of sputtering gas flow rate for biomedical applications. DC reactive magnetron sputtering technique was employed to deposit the coatings at different argon gas flow rates (5-20 sccm). X-ray diffraction method (XRD) and atomic force microscopy (AFM) were used to characterize the crystallographic structure and surface morphology. Mechanical and tribological properties of the coatings were evaluated by nanoindentation and scratch tests. The electrochemical behavior of the samples was also studied in Hank's solution at a physiological temperature (37 °C). The growth mechanism of the coatings was analyzed and subsequently, its effect on structure, morphology, and different properties was investigated. The results showed that the coatings deposited at lower sputtering gas flow rates (≤10 sccm) are more resistant to plastic deformation, wear, and corrosion in Hank's solution than those deposited at higher rates (>10 sccm) due to their dense structure as well as smooth and crack-free surface.