LAUSR

Abstract Indium zinc oxide/silver/indium zinc oxide multilayer structures with a very low resistivity and high transmittance were deposited on a polyethylene terephthalate substrate by DC magnetron sputtering. The electrical, optical, mechanical, and thermal properties of the multilayer films were investigated at different Ag layer thicknesses (10–20 nm). The multilayers demonstrated relatively constant resistance change (∆R/ R0) over repeated bending tests with a radius of 8 mm. Efficient Joule heating could increase the operating temperature of the film heaters (7.3 Ω/□) to 73.7 °C in ~20 s at 3 V; moreover, the heat distribution remained uniform after bending tests. A high transmittance (84.7%) at a wavelength of 550 nm and low sheet resistance (7.3 Ω/□) of the optimized multilayer was obtained at an Ag layer thickness of 15 nm. These results indicate that the multilayers are promising as transparent film heaters for next-generation flexible applications.