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Abstract A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which… Click to show full abstract
Abstract A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film properties. The trend of hardness and electrical conductivity in ceramic TiOx films is TiO > Ti2O3 > Magneli phases > rutile phase.
Keywords:
films titanium;
processing structure;
properties reactively;
sputtered films;
structure properties;
reactively sputtered
Journal Title: Thin Solid Films
Year Published: 2019
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Journal Title: Thin Solid Films
Year Published: 2019
Link to full text (if available)
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recommendations!