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Abstract Reactive deep oscillation magnetron sputtering with a pulsed reactive gas flow control and to-substrate reactive gas injection into the high-density plasma in front of the sputtered Mo target was… Click to show full abstract
Abstract Reactive deep oscillation magnetron sputtering with a pulsed reactive gas flow control and to-substrate reactive gas injection into the high-density plasma in front of the sputtered Mo target was used for a low-temperature (
Keywords:
magnetron sputtering;
reactive deep;
deep oscillation;
oscillation magnetron
Journal Title: Thin Solid Films
Year Published: 2021
Link to full text (if available)
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Journal Title: Thin Solid Films
Year Published: 2021
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!