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Abstract In this work, we have studied the influence of oxygen on the chemistry and morphology of nano-sculpted MgOx thin films prepared by magnetron sputtering in glancing angle configuration. First,… Click to show full abstract
Abstract In this work, we have studied the influence of oxygen on the chemistry and morphology of nano-sculpted MgOx thin films prepared by magnetron sputtering in glancing angle configuration. First, we have studied the poisoning mechanism of the Mg target by² combining target voltage and deposition rate measurements with chemical analysis of the deposited films by X-ray Photoelectron Spectroscopy. The results reveal a strong metal-to-compound transition at very low oxygen flows, namely
Keywords:
oxygen;
magnetron sputtering;
thin films;
glancing angle;
nano sculpted
Journal Title: Thin Solid Films
Year Published: 2021
Link to full text (if available)
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Journal Title: Thin Solid Films
Year Published: 2021
Link to full text (if available)
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recommendations!