LAUSR

A relatively simple yet accurate analytical model for the image formation in the imaging scanning TEM (ISTEM) imaging mode, which implements partial spatial incoherence using a combination of scanning illumination and conventional imaging, is presented. Based on an object function approximation the ISTEM intensity can be divided into a constant, a linear and a nonlinear term. Under certain conditions, which are discussed, the formation of both linear and nonlinear terms can be expressed by convolutions with point spread functions. A closer inspection of these allows an insight into the advantages of ISTEM compared to conventional TEM (CTEM). The findings of the proposed model are confirmed by comparison to multislice simulations. A close investigation of the linear coherent contrast transfer function allows the derivation of optimal imaging conditions to reach a maximum resolution for a given signal-to-noise ratio. The robustness of ISTEM towards temporal incoherence is finally demonstrated and discussed within the model.