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Abstract Operation characteristics of polycrystalline silicon (poly-Si) nanowire (NW) charge-trapping (CT) flash memory devices with a SiGe and a Ge buried channel are studied and compared in this work. The… Click to show full abstract
Abstract Operation characteristics of polycrystalline silicon (poly-Si) nanowire (NW) charge-trapping (CT) flash memory devices with a SiGe and a Ge buried channel are studied and compared in this work. The poly-Si NW devices with a Ge buried channel show faster programming and erasing speeds as compared to those with a SiGe one due to a lower energy barrier in tunneling layer with more Ge composition. The retention and endurance characteristics of devices with a Ge buried channel are similar to those with a SiGe one. Ge buried channel is promising to CT flash device for 3D nonvolatile memory applications.
Journal Title: Vacuum
Year Published: 2017
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