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Abstract The paper demonstrates the possibility to synthesize boron-containing coatings through magnetron sputtering of crystalline boron targets at a frequency of several hundred kilohertz, which is much lower compared to… Click to show full abstract
Abstract The paper demonstrates the possibility to synthesize boron-containing coatings through magnetron sputtering of crystalline boron targets at a frequency of several hundred kilohertz, which is much lower compared to rf magnetrons, and presents research data on the surface profile of such coatings deposited in different reactive (air, N2, O2) gases.
Keywords:
boron targets;
magnetron sputtering;
containing coatings;
boron;
boron containing
Journal Title: Vacuum
Year Published: 2018
Link to full text (if available)
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Journal Title: Vacuum
Year Published: 2018
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!