LAUSR

Abstract Nb2O5/Ag/ZnO multilayer electrodes with excellent optical and electrical properties were deposited by magnetron sputtering at room temperature, where the Ag films were obtained under argon mixed with small amounts of oxygen. The oxygen content could influence the morphology of Ag which plays a crucial role in electrical and optical performance of Nb2O5/Ag/ZnO electrodes. The optimized Nb2O5/Ag/ZnO electrode displays an average transmittance of 92% in the visible range, a sheet resistance of 4.9 Ω sq−1, a high mechanical flexibility without sheet resistance variation after bending 800 times and a scalable fabrication process. The as-obtained Nb2O5/Ag/ZnO multilayer electrode can act as a promising flexible planar-structured transparent electrode for optoelectronic device applications.