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Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering

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Abstract In order to investigate the microstructures and properties of Mo2N + MoS2 coatings, MoS2, Mo2N and Mo2N + MoS2 coatings were deposited by direct current magnetron sputtering. The crystalline structure, surface and cross-sectional… Click to show full abstract

Abstract In order to investigate the microstructures and properties of Mo2N + MoS2 coatings, MoS2, Mo2N and Mo2N + MoS2 coatings were deposited by direct current magnetron sputtering. The crystalline structure, surface and cross-sectional morphology, hardness and friction coefficient are characterized by X-ray diffraction, field emission scanning electron microscopy, nanoindentation and sliding tester, respectively. The results indicate that the Mo2N + MoS2 composite coatings are composed of Mo2N and MoS2 phases, but the (002) crystalline orientation of MoS2 phase is not detected in the composite coatings. The composite coatings display fine and compact columnar layer structure. The hardness and friction coefficient of composite coatings are about 17 GPa and 0.4, respectively. Compared with pure MoS2 or Mo2N, the overall performance of composite coatings is improved, which is attributed to the change of coating microstructures.

Keywords: properties mo2n; mo2n mos2; composite coatings; mos2 coatings; microstructures properties

Journal Title: Vacuum
Year Published: 2020

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