LAUSR

Abstract A mathematical model of surface erosion in a course of a trench formation by translationally moving ion beam of a Gaussian shape is considered. The solutions obtained in self-similar variables describe the states of equilibrium of the boundary value problem and their dependence on the sputtering parameters. It is shown that there are three parameter areas in which only smooth, smooth and discontinuous and only discontinuous solutions exist. The plots of the surface profiles corresponding to three possible types of solutions are given. Formulas for calculating the profile of etching trenches and examples of calculating profiles corresponding to smooth and discontinuous solutions are given.