LAUSR

Abstract In the application of accurate beam pointing, an important requirement for precise modeling and identification of the complex piezoelectric fast steering mirror (PFSM) system is still a critical task. A comprehensive model is proposed for the two-axis PFSM system through synthetical consideration on each physical component. The modeling precision of the system is greatly improved because the five main influencing factors are systematically considered. With the testing data, a specially designed identification methodology is presented by analyzing the influence of each component on the output and their interaction on different time scales. The parameter identification is finally transformed into an optimization problem. The identification result is evaluated by comparing the measured data with simulated outputs under different excitation conditions. The experimental results confirm the validity and correctness of the modeling and identification approaches.