LAUSR

Abstract Two basic methods to increase machining resolution for pulse electrochemical micromachining are discussed in this paper. The first technique is the widely used method of pulse duration reduction and the second is a seldom used technique of increasing the time constant of the circuit. A novel method to increase the time constant for improved machining resolution is proposed. A positive feedback loop is then added in an equivalent circuit of electrochemical micromachining, and its time constant is controlled by tuning feedback gain. In this way, feedback gain can be an effective control parameter for machining resolution, with experimental results illustrating that resolution is significantly improved with an increase in feedback gain. This technique is used to machine microstructures, and nanometer scale machining resolution is achieved.