LAUSR

Abstract A non-resonant stepping type piezoelectric actuator with bolt-clamped configuration was developed and tested in this work. This actuator was operated under clamping and driving mechanism by using two longitudinal-bending transducers. The longitudinal and bending deformations of the transducer were used to clamp and drive the slider, respectively. Such principle is totally different from the existing non-resonant actuators. This actuator was designed and its working principle was illustrated in detail. The motion characteristics of the driving foot were investigated by finite element simulation and experimental methods. A prototype was manufactured to validate the feasibility of the actuator driven by clamping and driving principle. The average step distance was tested as about 10.8 μm under the voltage and frequency of 400 Vp-p and 1 Hz. This actuator achieved the maximum velocity of 0.72 mm/s under the frequency of 60 Hz, and it outputted a velocity about 1.42 μm/s when the load mass was 1.47 kg. The tested results under PID closed-loop control indicated that this actuator acquired a positioning accuracy about 30 nm for 100 μm target displacement.