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Large Area 3D Structural Characterization by Serial Sectioning Using Broad Ion Beam Argon Ion Milling

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Structural characterizations are typically two dimensional (2D) plan views cut through a sample. While 2D studies are accurate and yield good results, there are instances where three dimensional (3D) characterization… Click to show full abstract

Structural characterizations are typically two dimensional (2D) plan views cut through a sample. While 2D studies are accurate and yield good results, there are instances where three dimensional (3D) characterization of sample volume is required to fully understand the material’s properties or structural behavior. Examples include habit plane and the orientation relationship between phase determination in bi-phase or multiphase materials [1], fatigue crack propagation [2, 3], and statistical grain size and shape measurements. Moreover, only 3D volume electron backscatter diffraction (EBSD) with five-parameter grain boundary analysis can provide a full understanding of grain boundaries roles and influences on a material’s properties [4]. The most common technique used for 3D volume serial sectioning in focused ion beam milling (FIB). This technique yields accurate results; however, it has limitations:

Keywords: ion beam; ion; serial sectioning; large area; characterization

Journal Title: Microscopy and Microanalysis
Year Published: 2017

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