LAUSR

Modern electron microscopy frequently generates new challenges for Energy Dispersive X-ray spectroscopy (EDX) detectors. In an increasing number of applications, low primary beam energies and currents are required for nondestructive analysis of sensitive samples or examination of regions close to the sample surface. For such applications, the fluorescence yield and therefore the signal to be detected by the EDX detector is very low. Combined with the demand for short measurement times, it is vital to collect as much of the available signal as possible. This sets the requirement for large area detectors in close proximity to the sample in order to achieve large solid angles.