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Recent development of helium ion microscopy (HIM) has enabled it as a two-column three-beam workstation with helium and neon ion beams generated from a GFIS column and gallium ion beam… Click to show full abstract
Recent development of helium ion microscopy (HIM) has enabled it as a two-column three-beam workstation with helium and neon ion beams generated from a GFIS column and gallium ion beam from a Ga-FIB column mounted on the microscope chamber at 54 angle to the stage. This is a typical configuration of Orion NanoFab model in the HIM family. With this setup, the NanoFab system is capable of performing serial sectioning and imaging where sectioning is performed with the Ga ion beam and imaging is normally done using the He ion beam and, sometimes, Ne ion beam.
Journal Title: Microscopy and Microanalysis
Year Published: 2017
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