LAUSR

By combining multiple X-ray detectors to enlarge the total detector area, new energy dispersive X-ray spectrometers exhibit dramatically enhanced collection efficiency. This provides significantly higher signal-to-noise ratio, enabling elemental mapping at the atomic scale [1-4]. The increased complexity in multi-detector systems has also brought new challenges in terms of absorption correction and X-rays being shadowed by holder as a function of tilt. To this end, we have previously developed a numerical that combines detector geometry, holder shadowing, Be filtering, and specimen absorption to quantitatively analyze elemental quantification on an atom-column by atom-column basis [3,5]. The numerical model incorporates detector and holder geometries by angularly discretizing the collected Xrays [5]. The effective detector solid angle, Ωeff is determined by integrating over all discretized X-rays, i, collected from every sample slice along the depth direction, t, and then can be further used to quantify absolute counts and counts ratio of the sample.