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Today’s aberration-corrected scanning transmission electron microscopes (STEM) routinely focus highenergy electrons down to a spot smaller than 1Å in diameter to perform scattering experiments that allow us to study the… Click to show full abstract
Today’s aberration-corrected scanning transmission electron microscopes (STEM) routinely focus highenergy electrons down to a spot smaller than 1Å in diameter to perform scattering experiments that allow us to study the atomic-scale structure of materials and devices. When combined with electron energy loss spectroscopy analysis of the inelastically scattered electrons, these narrow probes can also provide atomic-scale information about the composition and local electronic structure of bulk materials, defects and interfaces [1, 2].
Journal Title: Microscopy and Microanalysis
Year Published: 2017
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