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Challenges Associated with Transmission Experiments in the SEM

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STEM has been widely utilized for imaging and analysis of thin samples at much higher accelerating voltages (100 kV and up) in STEM/TEM or dedicated STEM instruments and has been… Click to show full abstract

STEM has been widely utilized for imaging and analysis of thin samples at much higher accelerating voltages (100 kV and up) in STEM/TEM or dedicated STEM instruments and has been studied for many years.[1] Transmission Kikuchi diffraction (TKD) has perhaps driven the most recent interest in low voltage transmission imaging in the SEM (some refer to this as t-SEM) and thin film microanalysis.[2,3] This paper will discuss the advantages of transmission imaging in the SEM along with some of the current challenges of this technique.

Keywords: experiments sem; associated transmission; transmission; challenges associated; stem; transmission experiments

Journal Title: Microscopy and Microanalysis
Year Published: 2017

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