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The Electron Probe Microanalysis (EPMA) instrument has been around for a long time, which utilises the X-ray Microanalysis techniques of Wavelength Dispersive and Energy Dispersive X-ray Spectrometry (WDS and EDS).… Click to show full abstract
The Electron Probe Microanalysis (EPMA) instrument has been around for a long time, which utilises the X-ray Microanalysis techniques of Wavelength Dispersive and Energy Dispersive X-ray Spectrometry (WDS and EDS). The WDS design has not changed much since its original development [1]. WDS exhibits far better spectral resolution than the conventional EDS. The combination of EDS and WDS produces a very powerful analytical technique allowing for excellent Quantitative X-ray Mapping (QXRM) [2, 3]. However, the Electron Microprobe operator using WDS, has to be meticulous in monitoring items such as gas flow, gas purity, gas pressure, noise levels of baseline and window, gas flow proportional counter (GFPC) voltage levels, count rate suppression, anode wire contamination and other parameters [2].
Journal Title: Microscopy and Microanalysis
Year Published: 2017
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