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Finding unstrained 10 -nm lattice defects in silicon, given 1011 per cubic centimeter

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Our ability to image individual atoms and atom-columns only brings the practical problem of finding a statistically-useful number of nanoscale structures into sharper focus. In crystalline materials like metals and… Click to show full abstract

Our ability to image individual atoms and atom-columns only brings the practical problem of finding a statistically-useful number of nanoscale structures into sharper focus. In crystalline materials like metals and semiconductors, a key tool for locating lattice defects has been diffraction contrast from defect strain fields. For example, the lattice can be oriented just off the diffracting condition in darkfield, at which point defect strain fields (even at low magnification) light up like stars in the night sky.

Keywords: silicon given; lattice defects; unstrained lattice; defects silicon; finding unstrained; lattice

Journal Title: Microscopy and Microanalysis
Year Published: 2017

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