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Ultra-High Energy Resolution EELS

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The High Energy Resolution Monochromated EELS-STEM (HERMES) system developed by Nion combines a ground-potential monochromator, a bright cold-field-emission (CFE) gun, an advanced aberration corrector, and a new EEL spectrometer. The… Click to show full abstract

The High Energy Resolution Monochromated EELS-STEM (HERMES) system developed by Nion combines a ground-potential monochromator, a bright cold-field-emission (CFE) gun, an advanced aberration corrector, and a new EEL spectrometer. The system is designed to allow <10meV energy resolution EELS while maintaining sub-nm spatial resolution at the sample. It is greatly extending the capabilities of vibrational spectroscopy in the electron microscope, which was introduced 3 years ago [1] and has already achieved: • sub-nm spatial resolution [2] • damage-free identification of different bonds including hydrogen ones in a guanine sample [3] • probing atomic vibrations at surfaces and edges of nano-objects, with nm spatial resolution [4].

Keywords: resolution; high energy; spatial resolution; resolution eels; energy resolution

Journal Title: Microscopy and Microanalysis
Year Published: 2017

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