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Application of Electron Counting to Electron Energy-loss Spectroscopy and Implications for Low-Dose Characterization

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Electron counting with direct detection (DD) sensors offers large improvements in resolution and signal to noise ratio (SNR) compared to conventional indirect detection (ID) sensors. The benefits offered by DD… Click to show full abstract

Electron counting with direct detection (DD) sensors offers large improvements in resolution and signal to noise ratio (SNR) compared to conventional indirect detection (ID) sensors. The benefits offered by DD sensors have yielded remarkable results for low-dose imaging [1]; however, it is unclear how electron counting would affect electron energy-loss spectroscopy (EELS). Here we quantify the performance of electron counting for EELS by comparing the Gatan K2 summit (DD sensor operated in counting mode) and the Gatan US1000FTXP (ID sensor with scintillator/fiber-optic/CCD design). The results indicate DD EELS will offer major advantages for low-dose spectroscopy.

Keywords: low dose; energy loss; spectroscopy; electron energy; electron; electron counting

Journal Title: Microscopy and Microanalysis
Year Published: 2017

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