LAUSR

Auger spectroscopy is a well-established surface analytical technique in the materials sciences, which takes advantage of the emission of electrons with characteristic energies (Auger electrons) from a sample irradiated by an electron beam. Like X-ray energies measured in an electron microprobe or scanning electron microscope, the kinetic energies of Auger electrons provide information about sample composition. Because Auger electrons originate only from the top few nanometers directly under the electron beam, the spatial resolution for Auger spectroscopy is primarily dependent on the primary electron beam diameter and is on the order of tens of nanometers.