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The novel ultra-low voltage SEM Delta [1,2] allows electron spectroscopic imaging of both secondary (SE) and backscattered (BSE) electrons with a primary energy down to 50eV and a resolution better… Click to show full abstract
The novel ultra-low voltage SEM Delta [1,2] allows electron spectroscopic imaging of both secondary (SE) and backscattered (BSE) electrons with a primary energy down to 50eV and a resolution better than 1nm. To recover the true sample spectra, we use Bayesian inference, a tool applying forward simulations. This statistical approach is especially suited to deal with the stochastic nature of the measurement process and provides physically motivated error estimates.
Keywords:
sem;
bayesian analysis;
spectroscopic sem;
electron spectroscopic;
analysis electron
Journal Title: Microscopy and Microanalysis
Year Published: 2018
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Journal Title: Microscopy and Microanalysis
Year Published: 2018
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!