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For most current Scanning Electron Microscopes (SEM), the traditional Everhart-Thornley secondary electron (SE) detector and annular backscattered electron (BSE) detector are complemented with several detectors placed in the column. To… Click to show full abstract
For most current Scanning Electron Microscopes (SEM), the traditional Everhart-Thornley secondary electron (SE) detector and annular backscattered electron (BSE) detector are complemented with several detectors placed in the column. To choose the right system suitable for appropriate application is a challenging task. TESCAN introduced two ultra-high-resolution SEM columns [1], [2] in the last two years. Here, we present a comparison of both systems and introduce recent improvements. Both systems allow angular filtering of SE, energy-filtering of BSE and angular BSE selection.
Journal Title: Microscopy and Microanalysis
Year Published: 2018
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