LAUSR

Nowadays, SEM-FIB systems are commonly used for TEM specimen preparation because of their advantages, for example, specific site/orientation control and time saving, as compared with traditional techniques. Besides traditional Everhart-Thornley (E-T) “secondary electron” (SE) detector, various other electron detectors such as in-lens SE detector, in-lens backscattered electron (BSE) detector and STEM detector are available in the Tescan GAIA3 SEM-FIB system at UCI. These detectors are very useful for in-situ monitoring TEM specimen preparation. Here I would like to report some examples of applying these detectors in the final stage of the specimen preparation.