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A FIB-SEM offers access to elemental and structural site-specific information at the nano-scale by the means of FIB-SEM tomography. However, as valuable as the obtainable data is, as much care… Click to show full abstract
A FIB-SEM offers access to elemental and structural site-specific information at the nano-scale by the means of FIB-SEM tomography. However, as valuable as the obtainable data is, as much care has to be taken during the acquisition to assure integrity and quality. With this contribution, we want to raise awareness for the different challenges of FIB-SEM tomography but also share the knowledge on optimal utilization of this technique.
Keywords:
sem;
sem tomography;
challenges high;
fib sem
Journal Title: Microscopy and Microanalysis
Year Published: 2018
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Journal Title: Microscopy and Microanalysis
Year Published: 2018
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!