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1. Physical Chemistry II, Friedrich-Alexander-Univers ität Erlangen-Nürnberg, Erlangen, Germany. 2. present address: Carl Zeiss Semiconductor Manufact uring Technology, Roßdorf, Germany. 3. Elettra-Sincrotrone Trieste, Area Science Park, Tr ieste, Italy. 4.… Click to show full abstract
1. Physical Chemistry II, Friedrich-Alexander-Univers ität Erlangen-Nürnberg, Erlangen, Germany. 2. present address: Carl Zeiss Semiconductor Manufact uring Technology, Roßdorf, Germany. 3. Elettra-Sincrotrone Trieste, Area Science Park, Tr ieste, Italy. 4. Swiss Light Source, Paul Scherrer Institut, Villig en, Switzerland. 5. CENEM, Friedrich-Alexander-Universität Erlangen-Nü rnberg, Erlangen, Germany. * Corresponding author, [email protected]
Keywords:
deposition recent;
induced deposition;
beam induced;
focused soft;
ray beam;
soft ray
Journal Title: Microscopy and Microanalysis
Year Published: 2018
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Journal Title: Microscopy and Microanalysis
Year Published: 2018
Link to full text (if available)
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recommendations!