LAUSR

The development of X-ray microscopy for fundamental scientific and industrial technology analysis is very important for the progress in scientific research. The complete and integrated facilities and tools can help users to get more insight into the basic property of the science research and the underlying physical mechanism. The X-ray nanoprobe (XNP) provides versatile X-ray-based inspection technologies, including diffraction, absorption spectroscopy, imageology, and so on. The XNP beamline particularity is listed in the followings: 1.Energy range: 4-15 kev 2.Photon flux: ≥ 10 photons/sec 3.Energy resolution ΔE/E: ≤ 2*10 with Si (111) crystal 4.Beam size at focal point: ≤ 50nm*50nm at 10kev (H*V, FWHM) 5.High-order harmonics: ≤ 1*10 6.Working distance (from the end of focusing optics to the focal point): ≥ 20mm. Also, it will improve the analysis scale of inhomogeneous materials, tiny and diluted samples to the nanoscale. The primary experimental technique of XNP includes X-ray fluorescence spectroscopy (for the analysis of the 3D distribution of elements), extended X-ray absorption spectroscopy (for the analysis of the electronic configuration at the atomic or molecular bonding length), X-ray excited optical luminescence [1-2] (for the analysis of the recombination and transport of carriers), in-phase scanning X-ray imaging (the Fourier phase transform calculation can improve the spatial resolution down to 3nm to 5nm, and detect the stress distribution inside the nanostructures)[3]. Figure 1 shows the XNP beamline endstation. Moreover, the high-transmitted XNP can be used to inspect the “Nano World” like atomic arrangements, chemical and electronic configurations, which are widely adopted in the physics, chemistry, materials science, semiconductor devices, nanotechnologies.