LAUSR

Hard X-ray transmission microscopy (HXTM) based on refractive X-ray optics was employed as an instrument in material science to investigate buried-in microstructures in two or three dimensions with spatial resolution approaching 100 nm [1-4]. In this microscope, the incoming beam goes through the condenser, and illuminates the sample. The objective lens magnifies the image of the sample on the highresolution CCD camera (pixel size 0.65 m). The X-ray magnification typically lies in the 5-100 range but is not strictly limited. With the extra magnification from X-ray optics, the maximum spatial resolution is no longer limited by the detector pixel size, but by the X-ray optics. The main factors influencing the spatial resolution are the numerical aperture and aberrations of objective lens.