X-ray mapping is an important function of both the SEM and EPMA, and in recent decades developments in detectors and computing technology has allowed the collection of hyperspectral maps. The… Click to show full abstract
X-ray mapping is an important function of both the SEM and EPMA, and in recent decades developments in detectors and computing technology has allowed the collection of hyperspectral maps. The latest hyperspectral detector to become available is the soft x-ray emission spectrometer (SXES) [1, 2]. This detector collects a limited range of the x-ray spectrum in parallel, but has lowered the minimum energy of detectable x-rays to as low as 45 eV, with an energy resolution as low as 99 meV for Mg-L (49 eV) [3]. This not only opens up the opportunity for direct lithium measurement in the microprobe, but also allows for the spectral mapping of L, M, and N lines of some elements. These low energy lines originate from transitions of electrons from orbitals that are involved in bonding, and thus the peak shape and position of these lines are sensitive to the local chemical environment.
               
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