LAUSR

The current algorithm of choice for performing atom probe reconstructions is the point projection method. This algorithm makes a number of geometric assumptions regarding the apex shape and field evaporated ion trajectories: assuming ions follow a mathematical projection off a hemispherical cap onto a plane representing the detector [1]. These simplistic assumptions are particularly problematic when considering heterogeneous materials systems, such as semiconductors, where they fail to capture the changes in sample geometry due to microstructure with differing evaporation fields, dielectric behavior, laser anisotropy, and underlying crystallography. These properties influence the trajectories of evaporated ions and introduce distortions into point projection reconstructions [2].