LAUSR

Spectroscopic cathodoluminescence (CL) — the analysis of the wavelengths of light emitted from a sample stimulated by (typically) the electron beam of a scanning electron microscope (SEM) — has been used widely to study material quality and compositional variations in compound semiconductors and to study light-matter interactions in nanophotonic applications. Traditionally, CL detectors analyzed only the wavelength distribution of the emitted light however, recent advancements in detector technology also now enable the direction (angle) and polarization distributions to be determined [e.g. 1]. Recently we reported an optimized method to capture the wavelength and angular distributions simultaneously over a large numerical aperture, with virtually no loss in resolutions using a technique termed wavelengthand angle-resolved cathodoluminescence (WARCL) [2]. Here, we extend the WARCL technique to study the emission pattern as a function of wavelength of a nitride semiconductor micro-pillar array.