LAUSR

Understanding the evolution of functional materials is highly desired for development and improvement of nanomaterials. In-situ TEM observation is powerful technique for studying the behavior of the materials under various condition such as heating, cooling, and various gas atmosphere in nano meter scale. The authors have developed in situ observation technique based on a cold FE TEM with capabilities of simultaneous SEM and STEM images and applied it to study the degrading mechanism of electrocatalysis under air at 200 °C [1][2]. Advancing miniaturization of research target makes imaging with sub angstrom resolution essential. Recent development of the aberration corrector enable us to observe samples at atomic resolution. Furthermore, micro electro mechanical systems (MEMS) chipbased specimen holders were developed. These holders provide highly stable observation even at high temperature. In this study, in-situ observation of catalysis under gas atmosphere using an aberration corrected STEM with a MEMS heating holder is reported.