LAUSR

Focused electron-beam deposition is a convenient addition to state-of-the-art resist-based patterning techniques. It employs local chemical vapor deposition (CVD) from a precursor gas induced by the beam, allowing the growth of nm scale features [1]. In a transmission electron microscope this can be used to create patterns on the nm scale with the readily available hydrocarbon contamination [2]. Here we present a novel technique to grow gold nanoparticles (NPs) on μm-scale clean graphene. Combining top-down electron-beam induced deposition of hydrocarbon contamination onto two-dimensional materials, with the bottom-up growth of gold NPs, we obtain patterns of gold NPs while introducing no additional contamination.