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Low Dose-Rate High-Resolution Transmission Electron Microscopy of Group III – Nitride Electronic Device Structures Using a Direct Electron Detector

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In recent years direct electron detectors became available that dramatically enhance the quality of atomic resolution images because their Modulation Transfer Function (MTF) approaches unity in the low frequency range,… Click to show full abstract

In recent years direct electron detectors became available that dramatically enhance the quality of atomic resolution images because their Modulation Transfer Function (MTF) approaches unity in the low frequency range, single electrons can be detected well above noise levels, and the field of view is greatly expanded [1]. Thus, MTF corrections to recorded high resolution images become marginal and atomic resolution images of radiation sensitive materials can be recorded with dose rates below 1 e/Ås [2].

Keywords: microscopy; high resolution; direct electron; electron; resolution images

Journal Title: Microscopy and Microanalysis
Year Published: 2019

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