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Phase Mapping in EBSD Using Convolutional Neural Networks

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Abstract The emergence of commercial electron backscatter diffraction (EBSD) equipment ushered in an era of information rich maps produced by determining the orientation of user-selected crystal structures. Since then, a… Click to show full abstract

Abstract The emergence of commercial electron backscatter diffraction (EBSD) equipment ushered in an era of information rich maps produced by determining the orientation of user-selected crystal structures. Since then, a technological revolution has occurred in the quality, rate detection, and analysis of these diffractions patterns. The next revolution in EBSD is the ability to directly utilize the information rich diffraction patterns in a high-throughput manner. Aided by machine learning techniques, this new methodology is, as demonstrated herein, capable of accurately separating phases in a material by crystal symmetry, chemistry, and even lattice parameters with fewer human decisions. This work is the first demonstration of such capabilities and addresses many of the major challenges faced in modern EBSD. Diffraction patterns are collected from a variety of samples, and a convolutional neural network, a type of machine learning algorithm, is trained to autonomously recognize the subtle differences in the diffraction patterns and output phase maps of the material. This study offers a path to machine learning coupled phase mapping as databases of EBSD patterns encompass an increasing number of the possible space groups, chemistry changes, and lattice parameter variations.

Keywords: diffraction patterns; phase mapping; chemistry; convolutional neural; machine learning

Journal Title: Microscopy and Microanalysis
Year Published: 2020

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