Owing to the development of aberration correctors in electron microscopy, lateral resolution (X-Y directions) has been improved down to ~40 pm in scanning transmission electron microscopy (STEM) [1]. Meanwhile the… Click to show full abstract
Owing to the development of aberration correctors in electron microscopy, lateral resolution (X-Y directions) has been improved down to ~40 pm in scanning transmission electron microscopy (STEM) [1]. Meanwhile the resolution in depth (Z) direction has recently gained much interests as it is important when mapping the whole 3-dimensional (3D) structure of a specimen [2]. It is effective to use a beam with
Keywords:
resolution;
microscopy;
resolution phase;
depth resolution;
phase images;
controlling depth
Journal Title: Microscopy and Microanalysis
Year Published: 2020
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Journal Title: Microscopy and Microanalysis
Year Published: 2020
Link to full text (if available)
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recommendations!