Electron probe microanalysis (EPMA) has been around for well over 50 years and is still widely used today for elemental composition of a material and determining the distribution of elements… Click to show full abstract
Electron probe microanalysis (EPMA) has been around for well over 50 years and is still widely used today for elemental composition of a material and determining the distribution of elements and their concentrations within a sample surface via point analysis and/or X-ray mapping (XRM). The EPMA of today allows for energy dispersive (EDS) and wavelength dispersive spectroscopy (WDS) analysis by collecting characteristic X-rays and continuum released from the sample surface after bombardment with electrons.
               
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