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Auger Electron Spectroscopy (AES): A Versatile Microanalysis Technique in the Analyst's Toolbox

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In order to determine the usefulness of an analytical technique and to differentiate it from other technique options for a given application, several criteria are important. These criteria include spatial… Click to show full abstract

In order to determine the usefulness of an analytical technique and to differentiate it from other technique options for a given application, several criteria are important. These criteria include spatial resolution (lateral vs. depth; imaging vs. elemental composition), sampling depth, detection limits and quantifiability of the data. A graphical comparison of many of the techniques that are at the analyst’s disposal are shown in Figure 1. The role of Auger in this context will be discussed in detail.

Keywords: auger electron; spectroscopy; analyst; microanalysis; technique

Journal Title: Microscopy and Microanalysis
Year Published: 2020

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